“GROWTH OF A ࢋࢀࢊ࡯ LAYER ON A SILICON SUBSTRATE AND STUDY OF THE ELECTROPHYSICAL PROPERTIES OF THE CREATED HETEROSTRUCTURE AND ITS EFFECT ON HUMIDITY”. 2026. Universal International Scientific Journal 3 (3.1): 749-53. https://universaljournal.uz/index.php/uxij/article/view/304.